Structure of TiAlN Reactive Sputtered Coatings

1 Technological Institute for Superhard and Novel Carbon Materials, Troitsk, Moscow region, 142190 Russia 2 Institute of Spectroscopy of RAS, Troitsk, Moscow region, Phizicheskaya street 5, 142190 Russia 3 Instituto de Ciencia de Materiales de Sevilla CSIC-US Avenida Americo Vespucio 49, 41092 Sevilla, Spain 4 Universite Libre de Bruxelles Faculty of Applied Sciences, Chemicals and Materials Department, Avenue F.D.Roosevelt, 50 (CP165/63) 1050 Brussels, Belgium