Design, fabrication and measurement of TSV interposer integrated X-band microstrip filter

In this paper, we present a TSV interposer integrated X-band microstrip filter. It designed as working at X band with an insertion loss (IL) of 2.2dB, measuring 2.8mm×3.7mm in size. With processed sample, the measured bandwidth (BW) is about 2.33GHz, the passband insertion loss is about 2.2dB.