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Fabrication of Small AlGaAs/GaAs HBT's for Integrated Circuits Using New Bridged Base Electrode Technology
Fabrication of Small AlGaAs/GaAs HBT's for Integrated Circuits Using New Bridged Base Electrode Technology
1994
Takumi Nittono
K. Nagata
Yoshiki Yamauchi
Takashi Makimura
Hiroshi Ito
O Nakajima
Keywords:
Heterojunction bipolar transistor
Electrode
Engineering
Electronic engineering
Heterostructure-emitter bipolar transistor
Integrated circuit
Fabrication
algaas gaas
zinc diffusion
carbon doping
Correction
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