A MEMS piezoelectric solid disk gyroscope with improved sensitivity

This paper introduces a MEMS piezoelectric solid disk gyroscope. The gyroscope operates in an in-plane elliptic bulk acoustic wave mode with a frequency of 284 kHz. This gyroscope is an improvement of the solid piezoelectric gyroscope. A device, 6 mm in diameter, has been fabricated through the microelectromechanical systems process, and achieved a relatively high sensitivity and bias instability. In this paper, it is described that the design, fabrication, circuit system and characteristics of the piezoelectric solid disk gyroscope.