Research of High Temperature Vacuum Resistence Furnace Exploited Specially for Processing of Nanomaterial Through CVD Method

2006

根据纳米材料CVD法制备工艺的特殊性对设备的苛刻要求,自主设计开发了一台用于纳米粉体制备用的高温真空电阻炉,介绍了该设备的组成结构及其性能特点,论证了该种电阻炉在相关领域内的应用前景.

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