Apparatus for treating a plate-like member and method of treating the same

The present invention provides a plate-shaped member processing apparatus and processing method. Efficiently removed with a thin film layer of a thin film layer is unnecessary plane plate member on the peripheral edge portion of the quadrangle can be formed on the substrate. Having a peripheral portion for the plate member is inserted and removing the peripheral portion of the processing chamber unnecessary thin film layers of the peripheral edge portion and the moving means of the plate-like member to move, the peripheral edge portion of the processing chamber is a top closed and the facing surface machining the peripheral edge portion structure peripheral edge portion of the opening of the hollow shape processing and a scattering preventing covers an opening surface of the peripheral edge portion of the processing by the scattering preventing covers the same shape as the opening surface formed by connecting a suction hood. The above-described process chamber in the peripheral edge portion of the nozzle is processed by shot peening processing mode scattering prevention cover is disposed to cover the wall surface of the ejection port of the nozzle portion of the peripheral edge.