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Trade-Off between Gate Oxide Integrity and Transistor Performance for FinFET Technology
Trade-Off between Gate Oxide Integrity and Transistor Performance for FinFET Technology
2017
Hsien-Ching Lo
Jianwei Peng
Chloe Yong
Suresh Uppal
Yi Qi
Hui Zhan
Yan Ping Shen
Xiaobo Chen
Jianghu Yan
Baofu Zhu
Shashidhar Shintri
Shimpei Yamaguchi
Talapady Bhat
Wei Hong
Yong Jun Shi
Suresh Regonda
Dongil Choi
Owen Hu
Manoj Joshi
Srikanth Samavedam
Keywords:
Analytical chemistry
Gate oxide
Transistor
Chemistry
Electronic engineering
Engineering physics
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