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SiO 2 /Si Interface Trap Buildup Induced by Infrared Pulse Laser Irradiation
SiO 2 /Si Interface Trap Buildup Induced by Infrared Pulse Laser Irradiation
2017
Keita Nomura
Hiroaki Itsuji
Daisuke Kobayashi
Kazuyuki Hirose
Keywords:
Irradiation
Radiation
Infrared
Semiconductor
Pulsed laser deposition
Materials science
Analytical chemistry
pulse laser irradiation
Optoelectronics
Correction
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