A micro-reactor array for fluorescence markers-based bioaffinity assays

Abstract This work reports the design, fabrication and optical characterization of a micro-reactor array (MRA), consisting of a matrix of transparent wells realized on a opaque silicon substrate, coupled with a CMOS Single-Photon Avalanche Diode (SPAD) array, for bioaffinity assays based on fluorescence markers. The MRA is designed to provide a number of reaction sites in the same chip that can be independently functionalized and monitored, allowing for a fast and all-on chip analysis.