Spin coating behavior of polyimide precursor solutions

Experimmental data confirm the utility of the following simple equation in predicting the spin coating behavior of polyimide precursor solutions: h=cβ 0 k β1 w β2 t β3 (1) in which c=polymer solution solids weight fraction; β i =fitted coefficient (Greek letter beta); h=film thickness after cure or solvent removal; k=polymer solution kinematic viscosity, centistokes; t=time, and: ω=wafer spin speed, rpm (Greek letter omega)