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IMPROVED WET CLEANING PROCESSING USING ELECTROLYTIC IONIZED WATER FOR TFT-LCD MANUFACTURING
IMPROVED WET CLEANING PROCESSING USING ELECTROLYTIC IONIZED WATER FOR TFT-LCD MANUFACTURING
1995
Takashi Imaoka
Senri Ojima
Kazuki Kubo
Hiroshi Morita
Tadahiro Ohmi
Mitsumori Ken-ichi
Oh Eui-yeol
Yasuhiko Kasama
Michio Yoshizawa
Koji Yamanaka
Masayuki Kato
Masayuki Toda
Keywords:
Thin-film transistor
Environmental chemistry
Waste management
Liquid-crystal display
Wet cleaning
Materials science
Electrolyte
Correction
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