Micro-region fluorescent scanning measurement system

The invention discloses a micro-region fluorescent scanning measurement system which comprises an exciting light source, an excitation light path part, a fluorescence signal collection light path part, a micro-region imaging light path part, a table-board, a two-dimensional electric translation system, a vacuum sample chamber, a vacuum pump, a low-temperature system and temperature control device, a grating spectrometer and a CCD detector, wherein the input end of the excitation light path part is connected with the exciting light source, and the output end of the excitation light path part is connected with the vacuum sample chamber; the excitation light path part is used for guiding laser to income into a sample in the vacuum sample chamber; the fluorescence signal collection light path part is used for collecting a fluorescence signal emitted from the sample; the micro-region imaging light path part is connected with the excitation light path and the fluorescence signal collection light path and is used for micro-region imaging and positioning of the sample surface topography; the excitation light path and the fluorescence signal collection light path part are arranged on the table-board; the two-dimensional electric translation system drives the table-board to do a two-dimensional scanning motion; the vacuum sample chamber is used for placing the sample; the vacuum pump is used for maintaining the vacuum degree of the vacuum sample chamber; according to the low-temperature system and temperature control device, the vacuum degree of the vacuum sample is maintained, and the sample chamber is maintained in a needed low temperature environment; the grating spectrometer is used for processing the fluorescence signal; and the CCD detector is used for acquiring the fluorescence signal.