Study of the temporal phase-shifting interferometry measurement under the Tokamak related vibration environment

Temporal phase-shifting interferometry technique (TPSI) has high accuracy in surface topography metrology and has been designing to diagnose the surface variation of plasma-facing materials (PFMs) in Tokamak. But the mechanical vibration of the Tokamak device will lead to the decrease of the measurement accuracy or even incorrect result. In order to solve the problem more, it is much desired to study the influence of the vibration on the topographic measurement in the broad parameter scope. Series experiments in the different vibration frequencies, amplitudes, modes and different deformation amounts and detection wavelengths were carried out in this work.