Ion Implantation for Surface Engineering

Low energy accelerators are used widely for the modification of materials and in research on material properties. The ion implantation of semiconductors becomes an industrial application of major importance. The ion implantation technique has steadely been extended to the intire range of materials including metals, ceramics, glasses and polymers.. This paper considers a number of areas in which ion beams are now applied, such as microelectronics, metallurgy, corrosion science,optics.