zinc oxide preparation process ZnO p-type or p-type ZnMgO.
2011
Preparing p-type doped zinc oxide (ZnO) or p-type doped zinc magnesium oxide (ZnMgO), comprises depositing a silica, which is optionally doped by a dopant element from column V of periodic classification of elements, on a surface of a substrate made of n-type doped ZnO or n-type doped ZnMgO, annealing the substrate and the deposited silica to induce outdiffusion of zinc from the substrate towards the silica and the formation of zinc gaps in a part of the substrate adjacent to the silica, and doping the part of substrate adjacent to silica by the dopant element. Preparing p-type doped zinc oxide (ZnO) or p-type doped zinc magnesium oxide (ZnMgO), comprises depositing a silica, which is optionally doped by a dopant element from column V of periodic classification of elements, on a surface of a substrate made of n-type doped ZnO or n-type doped ZnMgO, annealing the substrate and the deposited silica at a sufficient temperature and a sufficient time to induce outdiffusion of zinc from the substrate towards the silica and the formation of zinc gaps in a part of the substrate adjacent to the silica, and doping the part of substrate adjacent to silica by the dopant element. Independent claims are included for: (1) the p-type doped ZnO or ZnMgO prepared by the method; (2) the substrate; and (3) the heterostructure with quantum wells.
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