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Effect of the Mixed N2/O2 Oxidation Process on Improvement of the Sensitivity of the SiGe Nano-Wire
Effect of the Mixed N2/O2 Oxidation Process on Improvement of the Sensitivity of the SiGe Nano-Wire
2011
Kow-Ming Chang
Chu-Feng Chen
Chiung-Hui Lai
Yu-Bin Wang
Chung Hsien Liu
Cheng-ting Hsieh
Chin-ning Wu
Keywords:
Nanowire
Electrical engineering
Electronic engineering
Engineering
Nanotechnology
oxidation process
Correction
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