Nanoscale TiO2 and Ta2O5 as efficient antireflection coatings on commercial monocrystalline silicon solar cell

Abstract In this paper, we report the enhancement of photon to electron conversion efficiency of commercial monocrystalline silicon solar cells after deposition of nanoscale TiO2 and Ta2O5 as an antireflection coating. The nanoscale TiO2 and Ta2O5 ARC’s remarkably enhanced PEC efficiency of m-Si solar cells from 17.18% to 17.87% and 18.8% respectably. The enhancement in PEC efficiency is predominantly attributed to the increase in fill factor from 36.8% to 36.9% and 37.2% after deposition of nanoscale TiO2 and Ta2O5 as ARCs respectively. The reflectance of nanoscale TiO2 ARCs increased from 27% to 43% within the wavelength range from to 530 nm and decreases to 34% with increasing wavelength. However, for Ta2O5 the reflectance was 11% at 370 nm and increased up to 29% in the studied wavelength range. The reduced magnitude of reflectance for Ta2O5 throughout the studied wavelength resulted in notable improvement of PEC efficiency compared to TiO2. The phase formation of nanoscale TiO2 characterized by x-ray diffraction reviles the presence of both anatase and rutile phase TiO2 whereas Ta2O5 displays amorphous nature. The oxidation state of titanium (Ti) and tantalum (Ta) was evaluated from x-ray photon emission spectroscopy and observed to be in the form of Ti4+ and Ta5+ chemical state. The nanoscale thickness of both TiO2 and Ta2O5 ARCs was acquired by variable angle spectroscopic ellipsometry and found to be 55.2 nm and 70.8 nm respectively, and the same was confirmed by measuring cross-section thickness of ARCs using a scanning electron microscope.