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System for deposition of diamond like a-C:H films in Ar-C2H2 plasma with ion beam assistance
System for deposition of diamond like a-C:H films in Ar-C2H2 plasma with ion beam assistance
2018
I. V. Lopatin
Yu H Akhmadeev
D. Yu. Ignatov
S. S. Kovalskiy
E. A. Petrikova
Keywords:
Radiochemistry
Diamond
Ion beam
Materials science
Plasma
Deposition (law)
Analytical chemistry
Correction
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