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Crystallinity and electrical properties of Ar+O 2 +H 2 sputtered In–Ga–O thin films
Crystallinity and electrical properties of Ar+O 2 +H 2 sputtered In–Ga–O thin films
2019
Kenta Shimpo
Daichi Koretomo
Mamoru Furuta
Emi Kawashima
Yuki Tsuruma
Keywords:
Crystallinity
Chemical engineering
Thin film
Materials science
oxide semiconductor
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