TheRoleofInterfaces inDamascene Phase-Change Memory

contact (BEC)andGSTphasechange layers (Fig2).This Phase change memory(PCM)research haslargely focused on approach self-aligns BEC andGST regions reliably to bulkproperties toevaluate cellefficiency. Now both produce anefficient PCMcell. electrical andthermal interface resistances arecharacterized andshowntobecritical forunderstanding powerinanovel Damascene-GST cell. Interfaces reduce reset power20%and reset current 40%andallow reset current toscale faster than itwouldwithout interfaces. Introctio