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New DC and RF Power Supplies for Thin-Film PV Manufacturing
New DC and RF Power Supplies for Thin-Film PV Manufacturing
2011
J. Rauschenberger
P Lach
D Krausse
E. Mann
W. Głazek
U. Ambrosy
P. Ozimek
Keywords:
Sputter deposition
Thin film
RF power amplifier
Plasma-enhanced chemical vapor deposition
Materials science
Electronic engineering
Optoelectronics
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