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Effect of Metals (Fe,Cu) on 8-nm-Thick Gate Oxide Reliability
Effect of Metals (Fe,Cu) on 8-nm-Thick Gate Oxide Reliability
1996
Yoshimi Shiramizu
Masaru Tanaka
Shinya Yamasaki
Masaharu Nakamori
Nahomi Aoto
Hiroshi Kitajima
Keywords:
Gate oxide
Nanotechnology
Materials science
Inorganic chemistry
Optoelectronics
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