Thin Film Thickness Measurement of Whole Field Based on Spatial Carrier Frequency Interferometry
2009
The kernel of modern interferometry is to the obtain necessary surface shape and
parameter by processing interferogram with a reasonable algorithm. On the basis of the study the basic
principle of interferometry by using 2-D FFT arithmetic, a new method to measure the thin film
thickness is proposed based on the FFT algorithm. A test sample is placed into the light path in
Twyman-Green interferometer, the interference fringes were generated by the reference beam with the
tested beam reflected respectively from the film surface and the substrate surface. The interferogram is
collected by the image acquisition system. The algorithm processing software is prepared to realize
identification of the films edge, regional extension, filtering, unwrapping the wrapped phase etc, the
film thickness distribution in whole field can be obtained to realize the thickness measurement of thin
film samples automatically. The results indicate that the new method has the advantages of high
precision, whole test and non-contact measurement.
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