Experimental demonstration of low jitter performance and high reliable 1060nm VCSEL arrays for 10Gbpsx12ch optical interconnection
2010
No systematic studies on 1060nm high speed VCSELs have been reported in terms with reliability so far to our best
knowledge. In this work, a systematic and intensive study on reliability has been performed for our 1060nm VCSELs
consist of double intra-cavity and oxide confined structure with >70ps eye opening margin in Ib=3mA. Estimated power
dissipation per bit rate of >5Gbps/mW at Ib=2mA was obtained from low series resistance and low drive voltage
characteristics due to effective current injection in our double intra-cavity structure. Aging tests for 3,467pcs discrete
non-hermetic VCSELs were performed under 6mA, 70°C to 120°C and up to 5,736 hours, which is equivalent to over
10million device hours in normal operating condition of 40°C and Ib=5mA. We found one degraded device due to the
disconnection of the metal interconnecting layer, resulting in 81Fits (C.L.=90%) under Ea=0.35eV and no current
accelerated factor. Also, their degradation of threshold current after 1,000 hours operation was less than 0.1mA under
high stress condition of >40kA/cm 2 and 120°C, which corresponds to more than hundreds year operation.
No eye diagram degradation was observed as far as no large threshold current increase under the high stress condition
up to 40kA/cm 2 . It is experimentally proven that inherent potentiality of the VCSELs with 1060nm InGaAs-QW and
double intra-cavity structure would be applicable to the future large green data traffic system.
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