Tube unit, control unit, micro pump

A micropump includes: a tube unit including a tube which has elasticity, and one portion of which is disposed in an arc shape, a plurality of fingers, which are disposed radiating from a direction of a center of the arc shape of the tube, and a guide frame, which holds the tube and the plurality of fingers; and a control unit including a cam, which sequentially presses the plurality of fingers in a direction in which a liquid flows, a drive force transmission mechanism, which transmits a torque to the cam, and a control circuitry, which carries out a control of a motor which drives the drive force transmission mechanism, wherein the tube unit and the control unit are attached stacked one on the other, and are detachable.