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DRIE Si Nanowire Arrays Supported Nano-Carbon Film for Deriving High Specific Energy Supercapacitors On-Chip
DRIE Si Nanowire Arrays Supported Nano-Carbon Film for Deriving High Specific Energy Supercapacitors On-Chip
2021
Pai Lu
Xuyuan Chen
Per Ohlckers
Einar Halvorsen
Martin Hoffmann
Lutz Müller
Keywords:
nano carbon
Nanowire
Specific energy
Supercapacitor
Deep reactive-ion etching
Nanotechnology
Materials science
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