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Nanopatterning of Photosensitive Polymer Films
Nanopatterning of Photosensitive Polymer Films
2011
Zouheir Sekkat
Hidekazu Ishitobi
Mamoru Tanabe
Tsunemi Hiramatsu
Satoshi Kawata
Keywords:
Nanolithography
Polymer
Nanotechnology
Materials science
photosensitive polymer
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