Optical Constants of Thin Films of Silicon Oxycarbide Using the Transmission Spectrum

Silicon oxycarbide thin film was prepared by magnetron sputtering on BK7 glass, namely, K9 glass. And the wavelength dependence of refractive index was determined by the envelop method and Wemple and Didomenico dispersion relationship from transmission spectrum. The wavelength dependence of refractive index was fitted to Cauchy dispersion relationship and the data accorded with Cauchy dispersion relationship very well. Thickness of the film was determined and by comparing the relative standard deviation, we found it could make the result more accurate by fitting the data of refractive index to Cauchy dispersion relationship.