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Oxygen Gettering Properties of Boron Film Made by Diborane Discharge.
Oxygen Gettering Properties of Boron Film Made by Diborane Discharge.
1995
Takahiro Mochizuki
I. Fujita
Yuko Hirohata
Tomoaki Hino
Toshiro Yamashina
Akio Sagara
N. Noda
Osamu Motojima
K. Tsuzuki
M. Natsir
Keywords:
Oxygen
Getter
Boron
Diborane
Chemistry
Inorganic chemistry
Correction
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