On-chip integrated optic mirrors in Ti: LiNbO3 by ion-beam micromachining

A complete process is described whereby on-chip mirrors may be fabricated in Ti : LiNbO3 stripe waveguide devices using micro-focal ion-beam machining. Experimental results are presented for a device operating at 1.523 ?m wavelength, TM mode. An interferometric technique is used to distinguish the reflection from the on-chip mirror from other spurious reflections. Approximately 24% power reflectivity is observed. Results are compared with a simple theoretical model of the chip response under different conditions, and good agreement is obtained.