Gas supply method and the gas supply means

The present invention provides a gas supply method for supplying the raw material gas to the consumption zone, the feedstock gas passes through the solid raw material inside the container is heated and vaporized to give the gas supply method comprising : step (a), the carrier gas flow through the processing gas supply passage communicates with the consuming area, while measuring the gas pressure in the process gas supply path; step (B), of a solid material in the raw material container is heated, generating material gas; step (C), the carrier gas is the same flow rate is supplied with the above-described step (a) to inside the raw material container, so that the material gas flow in the processing gas supply path together with the carrier gas, while the measurement of the process the gas pressure in the gas supply path; and the step (D), based on the pressure measurement value obtained in the step (a), the pressure measurement values ​​and the carrier gas flow rate obtained in the step (c), the computing of the raw material gas flow.