A Mew Variable Angle Ft—ir Ellipsometer

Use of a Fourier—transform interferometer integrated with a variable incidence angle ellipsometer extends the spectral range and the capabilities of spectroscopic ellipsometry into the infrared. With a spectral range of 600 to 6600 cm—1, thick layers, such as epitaxial doped layers and polymers can be analysed. A full description of this novel instrument will be given. Incidence angle can be variedautomatically to enhance signal/noise and the ellipsometric data can be obtained together with vibrational absorption bands information to give a characteristic “fingerprint ” of the layers. Examples of spectra of HCN polymer on nickel, DMHS on aluminium and PMMA on silicon willbe presented for various incidence angles and layer thickness.