Microelectromechanical current measuring device
2009
A microelectromechanical (MEMS) current measuring device comprising a support portion (306), an optical portion (301) disposed on the support portion (306), said optical portion (301) an optical path (402, 403) and a magneto-sensitive element ( 401) in the optical path (402, 403), a light source (302a) which is disposed on the support portion (306) in operative communication with a first end of the optical path (402), and a photodetector (302), the on the carrier portion (306) is disposed in operative communication with a second end of the optical path (403).
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