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Formation of crystalline heteroepitaxial SiC films on Si by carbonization of polyimide Langmuir–Blodgett films
Formation of crystalline heteroepitaxial SiC films on Si by carbonization of polyimide Langmuir–Blodgett films
2017
Viktor V. Luchinin
S. I. Goloudina
V. M. Pasyuta
Mikhail F. Panov
A. N. Smirnov
D A Kirilenko
T. F. Semenova
Valentina P. Sklizkova
I. V. Gofman
V. M. Svetlichnyi
Vladislav V. Kudryavtsev
Keywords:
Analytical chemistry
Polyimide
Crystal
Physics
Carbonization
Langmuir–Blodgett film
Inorganic chemistry
Chemical engineering
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