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Oxygen Transport in ZrO_2, Al_2O_3, and Zr-Al-O High-K Gate Dielectrics
Oxygen Transport in ZrO_2, Al_2O_3, and Zr-Al-O High-K Gate Dielectrics
2001
W. Hartmut Schulte
B. W. Busch
T. Gustafsson
Serdar Sayan
Eric L. Garfunkel
Keywords:
Dielectric
High-κ dielectric
Oxygen
Thin film
Materials science
Analytical chemistry
Inorganic chemistry
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