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Thermal Oxidation of Undoped LPCVD Polycrystalline‐Silicon Films
Thermal Oxidation of Undoped LPCVD Polycrystalline‐Silicon Films
1986
C. Y. Lu
N. S. Tsai
Keywords:
Crystal growth
Chemical vapor deposition
Polycrystalline silicon
Thermal oxidation
Inorganic chemistry
Thin film
Chemistry
Silicon
Kinetics
Analytical chemistry
Correction
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