Method for producing a whole surface film forming substrate using the substrate holder and which

Substrate holder to improve the productivity of the entire film formation substrate, and provides a method for producing a whole surface film forming substrate using the substrate holder. A substrate holder which the first main surface to hold the substrate to be entirely deposited, the unit substrate is a plate-shaped member having a main surface having a small area than the main surface of the substrate, first the unit base It is fixed to the main surface, and a contact layer having a release surface to adhere to the second major surface of the substrate, and the holder unit composed of the unit fixing a large area than the main surface of the unit base having a surface, a second major surface and are face to face orientation of the unit fixing surface and the unit substrate, a plurality of the holder unit is fixed to the unit fixing face, the substrate holder comprising a carrier, and, and manufacturing method of the entire deposition substrate using the same.