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Electrical Characteristics of Piezoelectric RF-MEMS Tunable Capacitor
Electrical Characteristics of Piezoelectric RF-MEMS Tunable Capacitor
2007
Michihiko Nishigaki
Toshihiko Nagano
Kazuhide Abe
Kazuhiko Itaya
Takashi Kawakubo
Keywords:
Electronic engineering
Capacitor
Piezoelectric coefficient
Piezoelectric accelerometer
Engineering
Residual stress
PMUT
Microelectromechanical systems
Control engineering
Piezoelectric sensor
Piezoelectricity
Correction
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