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Performance of Polysilicon Gate HfO MOSFETs on
Performance of Polysilicon Gate HfO MOSFETs on
2003
Katsunori Onishi
Chang Seok Kang
R. Choi
Hag Ju Cho
Hee Kim
Siddharth Krishnan
Jack C. Lee
Keywords:
Metal gate
Materials science
Polysilicon depletion effect
Electronic engineering
Optoelectronics
polysilicon gate
Correction
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