Design of pulsed neon injection in the synthesis of W-B-C films using magnetron sputtering from a surface-sintered single powder cathode

Abstract The surface sintering approach was examined in the present manuscript to obtain single cathode material consisting of multiple elements. Design of electromagnetic discharge without the use of a mechanical press was utilized for this purpose at pulsed pressure oscillations, ranging from 25 to 125 Pa. Meanwhile, each pulsed plasma flux provided absolute energy varying from 87.8 to 279.5 J, resulting in a well-sintered tungsten boride crust within carbon matrix (WBx-C). Its application in sense of sintering degree was estimated by measuring thermal diffusivity, with a maximum value of 3.65 mm2/s achieved at the mid-range neon injection (75–100 Pa). Further, as-surface-sintered cathode material provided suitable contribution to the promising deposition rate (54 nm/min) of W-B-C films by employing gas injection magnetron sputtering in the single magnetron cycle. The quantitative analysis examined using photoelectron X-ray spectroscopy showed that W-B-C films are composed of four elements, of which the W/B ratio was differed prior to prepared cathode materials stoichiometry. The chemical bonding state study revealed the C-W, B-W, B-C and B-O bonds, of which W2BC nanocrystallites (∼ 2 nm) were formed in the amorphous structure under the arrangement of neon pulsed glow discharge, and as indicated results of fast Fourier transform and Raman spectra. Nucleation of those ternary nanoclusters promoted a Vickers microhardness result of 26.3 GPa, emphasizing a sensitive response to the mechanical performance of deposited W-B-C films.