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Nitrogen profiling in nitride films and nitrogen-implanted samples using the reactions at 6 MeV incident energy
Nitrogen profiling in nitride films and nitrogen-implanted samples using the reactions at 6 MeV incident energy
1992
H. Artigalas
A Chevarier
N. Chevarier
M. El Bouanani
E. Gerlic
N. Moncoffre
B. Roux
Michael S. Stern
J. Tousset
Keywords:
Chemistry
Nitrogen
Analytical chemistry
Profiling (computer programming)
Nitride
Correction
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