FABRICATION AND PERFORMANCE OF MULTILAYER COATED LAMINAR PHASE GRATING IN THE SOFT-X-RAY REGION

The fabrication and characterization of soft X-ray multilayer laminar phase gratings are described in this paper. The measurement of the optical performance of soft X-ray multilayer phase gratings at the Beijing Synchrotron Radiation Facility is described in detail. The measurement results are analyzed and compared with theoretical predictions.