Method for producing group III nitride crystal, group III nitride crystal obtained by such method, and group III nitride substrate applying the group III nitride crystal

2004 
The present invention provides a group III nitride crystal manufacturing method, which is in an atmosphere containing nitrogen, a flux containing at least one group III element and an alkali metal from among Ga, Al and In contained selected Mg , followed by growth of the group III nitride crystal in the flux, thereby forming a group III nitride substrate. Since Mg is a P-type dopant material of group III nitride crystal, and therefore even if mixed with Mg in the crystal, the crystal is still exhibit P-type or semi-insulating electrical characteristics, is not a problem in the application of electronic devices. Further, by allowing the flux contains Mg, the amount of nitrogen dissolved in the flux increases, the crystal growth can be performed in a rapid growth rate, reproducibility of crystal growth is improved.
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