A Fully Closed Nano-Focus X-Ray Source With Carbon Nanotube Field Emitters

We developed a fully closed nano-focus X-ray source using carbon nanotube (CNT) field emitters. The nano-focus X-ray source includes a fully vacuum-sealed CNT Electron-gun (E-gun) tube and E-beam-focusing modules consisting of electrostatic and magnetic lenses, facilitating very compact and high-resolution X-ray imaging. The paste-printed CNT emitters were prepared in a small pattern as an electron source, and the entire components, including the CNT emitter module, Cu tubes, collimators, and transmissive anode target, were specially brazed at an elevated temperature, resulting in a very compact E-gun tube. The CNT emitter showed a stable and reliable emission current with its density of over 300 mA/cm 2 even in the vacuum-sealed E-gun tube. With the anode grounded and the CNT emitter module biased to negative high voltages, we achieved a considerably magnified x-ray image of a several hundred nanometer resolution. The fully vacuum-sealed CNT E-gun tube along with the magnetic lens module can offer much more compact, easily maintainable, high-resolution X-ray imaging compared with conventional open-type thermionic X-ray sources.