Annealing Induced Morphology of Silver Nanoparticles on Pyramidal Silicon Surface and Their Application to Surface Enhanced Raman Scattering

This paper reports on a simple and cost-effective process of developing a stable surface-enhanced Raman scattering (SERS) substrate based on silver (Ag) nanoparticles deposited on silicon (Si) surface. Durability is an important issue for preparing SERS active substrate as silver nanostructures are prone to rapid surface oxidation when exposed to ambient conditions, which may result in the loss of the enhancement capabilities in a short period of time. Here, we employ the galvanic displacement method to produce Ag nanoparticles on Si(100) substrate prepatterned with arrays of micropyramids by chemical etching, and subsequently, separate pieces of such substrates were annealed in oxygen and nitrogen environments at 550 °C. Interestingly, while nitrogen-annealed Si substrates were featured by spherical-shaped Ag particles, the oxygen annealed Si substrates were dominated by the formation of triangular shape particles attached with the spherical one. Remarkably, the oxygen-annealed substrate thus produced sh...