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Compensation by design of thermal dilatation in RF MEMS switches
Compensation by design of thermal dilatation in RF MEMS switches
2005
Q.-H. Duong
X. Lafontan
Dominique Collard
Lionel Buchaillot
Petra Schmitt
Patrick Pons
F. Flourens
Francis Pressecq
Keywords:
Materials science
Microelectromechanical systems
Optoelectronics
thermal dilatation
Correction
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