COMPENSATION AND SIGNAL CONDITIONING OF CAPACITIVE PRESSURE SENSORS

Implementation of a novel digital temperature compensation method, developed for piezoresistive pressure sensors, to the field of capacitive sensors is presented. Possibilities for the compensation of sensor parameters such as sensor nonlinearity and temperature sensitivity are analyzed. In order to achieve effective compensation and linearization, different approaches to digital descriptions of sensor characteristic are investigated and re- ported, such as two-dimensional rational polynomial description and Chisholm approximants. Results of sensor response are compared against reference pressure source and most effective digital temperature compensation is proposed.