FEA analysis of the multicell piezoelectric motor

The presented paper concerns a design, modeling and chosen tests of the prototype multicell piezoelectric motor (MPM). The principle of operation based on three independent traveling wave actuators is presented. The main materials and technologies used in the fabrication process are described. The structure of the motor is modeled using static and modal FEM analysis. The process of traveling wave generation in the MPM structure is demonstrated. Finally, the main results of the simulation are validated by measurements of MPM prototype. The natural frequencies of three actuators are measured along with the corresponding displacements at two locations.