ТОНКОПЛІВКОВИЙ СЕНСОР НА ОСНОВІ ZnO

Gas sensor electronic is one of those areas who recently most dynamically develops. The need for development of gas sensor controls is caused by necessity of the control over an ecological condition of an environment and a safety for live of the person. Semiconductor sensor controls — the most perspective gas sensor controls as they have the small sizes, a simple design, a small current consumption, are produced on group technology of microelectronics that provides their rather low cost and compatibility with electronic devices for the further processing signals. The scope of gas sensor controls which react to pairs spirit, depends from measurable concentration. So, in the field of low concentration (a little ppm), sensor controls are used for the analysis of the contents of alcohol in air which is exhaled by the person. Whereas sensor controls which work in the field of high concentration, are necessary for the control of biotechnological processes over manufacturing alcoholic drinks in the industry. In work it is investigated sensitivity of thin-film gas sensor controls of resistive type a basis oxyde zinc to ethyl alcohol vapor. Change of resistance a gassensitivity film is investigated at action of gas. If the sensor control has semiconductor film of n-type (ZnO) as gassensitivity element then resistance decreases in the presence of ethyl vapor. Doping influence on size of a gas sensor sensitivity. Impurity Al and In considerably improve sensitivity of a thin-film sensor control basis ZnO. Mechanisms of influence of impurity on sensor sensitivity to ethanol vapor is disscused.