Innovative and Established Strategies for the Surface Analysis of Nitrogen and Oxygen‐Rich Plasma Polymer Films by XPS: An Introductory Guide

Nitrogen- and oxygen-based plasma polymer films are materials with a complex and partially elusive surface chemistry. We present an overview of innovative and established X-ray photoelectron spectroscopy (XPS)-based analysis strategies developed to elucidate the surface chemistry of such films. We focus on both experimental methods and data analysis strategies and include the following topics: high-resolution spectra curve fitting, aging, chemical derivatization, and depth profiling by angle- and energy-resolved XPS.